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三維光學(xué)輪廓測量儀

SuperView W1

直接聯(lián)系

深圳市中圖儀器股份有限公司

深圳

產(chǎn)品規(guī)格型號(hào)
參考報(bào)價(jià):

面議

品牌:

中圖儀器

型號(hào):

SuperView W1

關(guān)注度:

3113

應(yīng)用行業(yè):

汽車工業(yè)、半導(dǎo)體加工、精密加工、航空航天、國防軍事、造紙工業(yè)、鋼鐵工業(yè)、薄膜加工、生物醫(yī)學(xué)、MEMS、能源器件、微電子、信息存儲(chǔ)、結(jié)構(gòu)光學(xué)和通訊產(chǎn)品

產(chǎn)品介紹

SuperView W1三維光學(xué)輪廓測量儀是利用光學(xué)顯微技術(shù)、白光干涉掃描技術(shù)、計(jì)算機(jī)軟件控制技術(shù)和PZT垂直掃描技術(shù)對(duì)工件進(jìn)行非接觸測量,還原出工件3D表面形貌宏微觀信息,并通過軟件提供的多種工具對(duì)表面形貌進(jìn)行各種功能參數(shù)數(shù)據(jù)處理,實(shí)現(xiàn)對(duì)各種工件表面形貌的微納米測量和分析的光學(xué)計(jì)量儀器。

SuperView W1三維光學(xué)輪廓測量儀只需操作者裝好被測工件,在檢定軟件上設(shè)定物鏡倍率和測量模式后點(diǎn)擊“開始”按鈕,光學(xué)物鏡會(huì)對(duì)工件表面進(jìn)行自動(dòng)對(duì)焦和非接觸掃描,并按設(shè)定的位置進(jìn)行測量,軟件界面會(huì)實(shí)時(shí)掃描物體宏微觀表面形貌;掃描結(jié)束后,操作者可通過分析工具對(duì)生成的3D形貌進(jìn)行分析,得到如輪廓、厚度、粗糙度、體積等多種表面形貌測量分析數(shù)據(jù)。

該產(chǎn)品具有精度高、使用方便、功能強(qiáng)等優(yōu)點(diǎn),采用非接觸式傳感器掃描技術(shù),用于對(duì)各種產(chǎn)品和部件的表面形貌特征進(jìn)行測量和分析,它比傳統(tǒng)的探針式輪廓儀操作更方便,測量精度更高。

由于采用非接觸無損的測量方式,避免了對(duì)被測物體造成劃痕和磨損,尤其適用于各種柔軟材料、易腐蝕材料和傳統(tǒng)方式無法檢測的表面形態(tài)測量和分析。

還能夠?qū)Ω鞣N表面的工件和材料從宏觀到微觀的進(jìn)行長度、高度、間距、水平距離、垂直距離、角度、圓弧半徑、表面粗糙度等幾何參數(shù)進(jìn)行亞微米、納米級(jí)測量和分析。

系統(tǒng)軟件為簡體中文操作系統(tǒng),操作方便。


SuperView W1三維光學(xué)輪廓測量儀性能特點(diǎn):

1)     使用白光干涉測量技術(shù),非接觸式、非破壞性、快速表面形貌測量與分析;

2)     臺(tái)階高度測量分辨率達(dá)0.1 nm;

3)     可搭配黑白或彩色相機(jī)進(jìn)行2D、3D顯示和測量功能;

4)     配置電動(dòng)鼻輪,可同時(shí)掛載多種物鏡并程序化控制切換使用;

5)     采用雙光源模式,適應(yīng)特殊樣品測量;

6)     測量范圍100×100mm(可按客戶定制尺寸)

7)     配置低倍率物鏡(2.5×和5×倍率),可進(jìn)行大面積3D測量;

8)     提供多種表面參數(shù)測量功能,如斷差高度、夾角、面積、體積、粗糙度、波紋度、薄膜厚度及平面度;

9)     提供超過250多種各類參數(shù)(含2D、3D)計(jì)算;

10)   友好的人機(jī)界面,簡便的圖形化控制系統(tǒng)及3D圖型顯示;

11)   多種交換文件格式,可儲(chǔ)存與讀取多種3D輪廓文件格式;


SuperView W1三維光學(xué)輪廓測量儀應(yīng)用:

SuperView W1三維光學(xué)輪廓測量儀廣泛應(yīng)用于汽車工業(yè)、半導(dǎo)體加工、精密加工、航空航天、造紙工業(yè)、鋼鐵工業(yè)、薄膜加工、生物醫(yī)學(xué)、MEMS、能源器件、微電子、信息存儲(chǔ)、結(jié)構(gòu)光學(xué)和通訊產(chǎn)品等許多行業(yè)領(lǐng)域中。


各類光滑、連續(xù)光滑和適度粗糙物體表面從毫米到亞微米、納米尺度3D形貌輪廓、坐標(biāo)、厚度、粗糙度、體積、表面紋理等測量。


SuperView W1三維光學(xué)輪廓測量儀技術(shù)指標(biāo):

光源

白光LED;綠光LED

影像系統(tǒng)

1280×1024

普通物鏡

1×、2.5×5×、10×、20×50×、100×150×

干涉物鏡

5×、10×20×、50×、100×

坡度

小于42o

物鏡座

電控5孔物鏡轉(zhuǎn)盤

光學(xué)ZOOM

1×0.5×                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                    

XY移動(dòng)平臺(tái)

測量范圍:100×100mm(可根據(jù)客戶需要定制)

精度:0.5μm

分辨率:0.01μm

負(fù)載:10kg

控制方式:自動(dòng)

水平調(diào)整

手動(dòng)調(diào)整,±4°

Z

移動(dòng)范圍:100mm

分辨率:0.01μm

PZT掃描

行程:100μm

分辨率:0.8nm

重復(fù)性:5nm

掃描速度:≤30μm/s

測量模式與精度

垂直掃描VSI;

準(zhǔn)確度(4.43μm臺(tái)階高):0.75%

重復(fù)性(4.43μm臺(tái)階高):0.1%

相移法掃描PSI

準(zhǔn)確度(57nm臺(tái)階高):1.5%

重復(fù)性(57nm臺(tái)階高):0.3%

一般測量時(shí)間

(掃描范圍10μm)

VSI10SPSI3S


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