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TMC STACIS III主動隔振系統(tǒng)

直接聯(lián)系

森泉光電有限公司

美國

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322

產(chǎn)品介紹

STACISIII是先進的主動振動隔離系統(tǒng)。采用先進的慣性振動傳感器，復雜的控制算法，和先進的壓電致動器。STACIS通過連續(xù)測量地板活動、擴大和收縮壓電致動器過濾地板振動來進行實時隔離振動。

*初被設計用于先進半導體工廠的精密顯微光刻、計量和檢測設備的隔振，STACIS現(xiàn)在是嘈雜環(huán)境中敏感儀器的行業(yè)標準解決方案，包括但不局限于半導體晶圓廠、失效分析實驗室、納米技術研究、納米加工設備和材料研究。

STACIS III包括一個新型改進的數(shù)字控制器----DC - 2020。它的前后面板上有新型雙核處理器，以太網(wǎng)和USB串口，這個新型先進控制系統(tǒng)為用戶提供了一個現(xiàn)代的、易于使用的圖形用戶界面(GUI)。

擁有在世界各地的數(shù)百個成功安裝案例，STACIS對于大部分振動敏感儀器來說都是理想的振動消除系統(tǒng)。

Active degrees of freedom	6
Active bandwidth	0.6 Hz - 150 Hz
Passive natural frequency	18 Hz vertical and horizontal
Effective active resonant frequency	0.5 Hz
Isolation at 1 Hz	40% - 70%
Isolation at ≥2 Hz	≥90%
Settling time after a 10 lb (4.5 kg) step input (10:1 reduction)	0.3 sec
Internal noise	<0.1 nm RMS
Operating load range per isolator	Low capacity: 400-1100 lbs (181-499 kg) Med capacity: 900-2100 lbs (408-953 kg) Hi capacity: 1900-4500 lbs (862-2041 kg)
Static lift capacity per isolator	9000 lbs (4090 kg)
Stiffness (1000 lb / 454 kg mass， Med capacity isolator)	40，000 lb/in. (73 x 105 N/m)
Magnetic field emitted at maximum 4 in.(102 mm) from the isolator	<0.02 μG broadband RMS

Environmental and safety	CE and RoHS compliant
Active isolation elements	high-force piezoelectric actuators that receive signal from a high-voltage amplifier with an output of up to 800 VDC
Passive isolation element	single stiff isotropic elastomer (no compressed air supply required)
Vibration sensor elements	downward facing geophone type inertial sensors that measure floor vibration below the isolator and deliver voltage proportional to the velocity of vibration motion
Active feedback control loop	Floor vibration is measured， processed and attenuated below the spring supporting the isolated surface
Isolator dimensions (WxDxH)	11.75 x 12.5 x 10.8 in. 300 x 320 x 275 mm
Isolator weight	75 lb (34 kg)
Operating temperature	50° - 90° F 10° - 32° C
Storage temperature	-40° - 130° F -40° - 55° C
Humidity (operating)	30 - 60%
System power requirements	100， 120， 230， 240 VAC 50/60 Hz AC; <600 w CE compliant
Floor displacement	<480 μin. (12 μm) below 10 Hz
Isolator count per system	minimum of 3
Options	laminated stainless steel platforms， frames， risers， leveling devices， earthquake restraints， lifthoods

Dimensions (WxDxH)	19 x 8.5 x 1.75 in. 483 x 216 x 45 mm
Weight	6.3 lb (2.9 kg)
Processor	150/75 MHz dual core
Sampling rate	10 kHz
Analog outputs	16 channels
Analog inputs	16 channels
Status light	single LED
Front panel ports	1x serial USB 2.0 1x serial Micro-USB 1x Ethernet RJ-45 2x BNC
Rear panel ports	1x serial USB 2.0 1x Ethernet RJ-45 1x RS-232 DB-9 legacy serial for legacy STACIS 2100 isolators
User interface	Front panel LCD display Character menu on HyperTerminal Extended GUI for Microsoft Windows Embedded Ethernet GUI

4500 lbs (2045 kg) payload tested with simulated vibration at VC-C (500 μin./s， 12.5 μm/s RMS)

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